화학공학소재연구정보센터
Thin Solid Films, Vol.302, No.1-2, 235-238, 1997
Polarization Processes in Anodic Oxide-Films
The paper is concerned with the polarization processes in the amorphous anodic oxide films on Al, Ta and Nb. The conditions of oxide production are selected so that anodic oxide films do not incorporate any crystallites. It is shown that the analysis of the frequency characteristics of a planar metal/oxide/metal system (MOM system) with such a film provides a way for separating the deformation polarization of electronic and ionic displacement and relaxation polarization as well as the loss due to ohmic conductivity. The relaxation polarization is shown to be responsible for the permittivity dispersion and the amount of dielectric loss.