화학공학소재연구정보센터
Thin Solid Films, Vol.302, No.1-2, 250-255, 1997
On the Determination of the Sp(3) to Sp(2) Ratio in Diamond-Like Carbon Thin-Films
The carbon bonding ratio in diamond-like carbon (DLC) thin films has been estimated from the epsilon(2) spectra obtained by spectroscopic ellipsometry. A method has been developed to find out the atomic fractions of sp(3)- and sp(2)-bonded carbon atoms by combining the various features of the existing methods. The atomic fraction of sp(3)-bonded carbon atoms has been determined by fitting the gaussian curves in the experimentally observed epsilon(2) spectra in the low energy range (<4 sV). The atomic fraction of sp(3)-bonded carbon atoms has been determined by calculating the total electron density in the DLC matrix. The amount of hydrogen present in DLC films has also been taken into account.