Thin Solid Films, Vol.303, No.1-2, 117-121, 1997
Surface Studies of Chemically Vapor-Deposited Silicon Films Using Friction Force Microscopy
The average friction coefficient as a new parameter for surface characterization is presented. The measurement conditions for roughness were analysed and the importance of the applied force was proven. The quantitative measurements of friction force versus applied force are presented. We found that the average friction force linearly increased with applied force and was reversible with load. The connection between the average friction coefficient and the roughness surface was experimentally demonstrated.