Ultra water-repellent films were prepared using tetramethylsilane (TMS) and fluoro-alkyl silane (FAS) by microwave plasma-enhanced CVD (PECVD). The contact angle for water drops increased with the total pressure of reactants. The maximum contact angle was about 160 degrees. Surface roughness increased with total pressure due to the growth of particles. Water repellency was dominated by not only the fluorine concentration at the surface but also the surface roughness.