화학공학소재연구정보센터
Thin Solid Films, Vol.322, No.1-2, 46-55, 1998
UHV magnetron sputtering of silver films on rock salt : quantitative x-ray texture analysis of substrate-temperature-dependent microstructure
Using X-ray diffraction methods, including pole figure determination, the microstructures of silver buffer layers deposited by magnetron sputtering on to (001) rocksalt are investigated as a function of substrate temperature. A quantitative analysis is reported of the grain orientations, and the transition from (111) orientation polycrystalline films to (001) single-crystal films with increasing substrate temperature is confirmed. In addition, the relative proportion of the two distinct (111) orientation relationships is measured as a function of substrate temperature for the first time. It is shown that the pole-figure technique can be used for quantitative studies of the microtwinning in the (001) silver grains; both the volume fraction (at most 1.5%), and the twin thickness (similar to 6 nm, from diffraction streaking) can be determined.