Epitaxially grown La0.7Sr0.3MnO3 (LSMO) films were prepared on SrTiO3(001), LaAlO3(001) and MgO(001) single-crystal substrates by dipping-pyrolysis process. The fluctuation of alignments (mosaicity) of the films was evaluated based on X-ray diffraction 2 theta/theta scans, beta scans (pole figures) and asymmetric 2 theta/omega scans (reciprocal-space maps). Lattice types and epitaxy were examined in the films after heat treatment at 1473-1873 K; the lattice type of the films on SrTiO3 was pseudocubic, whereas those on LaAlO3 and MgO were pseudocubic or rhombohedral, depending on the heat-treatment temperature. A mosaic spread (Delta omega) of the LSMO film varied with the lattice-mismatch value between film and substrate. The LSMO films on SrTiO3 (lattice misfit approximate to 1%) showed high epitaxy with a low Delta omega (approximate to 0.50 degrees), whereas the films on MgO (misfit approximate to 8%) exhibited a larger Delta omega (approximate to 2.8 degrees). Also, surface morphology of the film was found to markedly depend on the kind of substrate materials and annealing temperature.