화학공학소재연구정보센터
Thin Solid Films, Vol.325, No.1-2, 79-82, 1998
Thickness dependence of the structural properties of sol-gel derived Sr0.6Ba0.4Nb2O6 films
Structural changes in sol-gel derived Sr0.6Ba0.4Nb2O6 (SBN60) films on (001) Si substrates have been studied as a function of him thickness in the range of 0.65-2.3 mu m. These films comprise a stack of dip-coated layers. Preferred and better oriented (001) SBN layers have been obtained in thicker films. Increased grain size and decreased porosity have also been observed. Prolonged annealing of the films, however, shows no apparent effects on these structural changes. In the present studies, we have fabricated SBN films of up to 2.3 mu m thick with good mean crystallinity. Our results indicate that progressively improved sol-gel films can be produced by increasing the number of dip-coated layers.