Ultrathin organic films were fabricated via dendritic growth on modified gold, and quartz substrates. The quartz and silicon surfaces were treated with 3-aminopropyltriethoxy silane and the gold surface with cystamin to afford modified surfaces bearing amino groups. Ultrathin organic films were prepared by successively amidation of the amino terminated surface with dimethyl terephthalate to give an ester terminated surface, amidation of the obtained ester terminated surface with ethylenediamine to give an amino terminated surface, Michael addition of methyl acrylate to the amino terminated surface to produce an ester terminated surface, and then amidation of the obtained eater terminated surface with ethylenediamine to produce an amino terminated surface again. The dendritic multilayer film was obtained by repeating the above processes. The introduction of phenyl rings make it possible for monitoring the film growth with UV-Vis spectra. The dendrite growth of ultrathin films were studied with grazing incidence FT-IR spectra (GIR) and X-ray photoelectron spectroscopy.