화학공학소재연구정보센터
Thin Solid Films, Vol.333, No.1-2, 65-70, 1998
Oxy-acetylene flame chemical vapour deposition of diamond film II : the influence of deposition parameters on diamond composition
Different surface spectroscopies (Raman, valence band photoemission, Auger and X-ray absorption) were used to determine the composi tion of diamond films. The results obtained permit comparisons to be made between the different techniques used and with the morphology conclusions of the Part I. All the techniques are in agreement and are confirmed to measure the amount of diamond in the films. However, there are some differences between Raman spectroscopy and X-ray absorption due to their different sensitivity to defects in the diamond structure. This could cast doubt on the significance of Raman quality, used in many papers. We consider there to be a need for more in-depth research as XAS is a technique which presents many advantages for monitoring CVD diamond quality. With the best process parameter values, these techniques demonstrate that flame CVD produces diamond films with very low graphite or amorphous carbon contents. Acetylene flame CVD could therefore be a good method for depositing diamond films for specific applications.