Based on the achievement of epitaxial growth in superconducting YBa2Cu3O7 - delta, ferromagnetic Nd0.7Sr0.3MnO3 and conductive La0.5Sr0.5CoO3 films, we discuss influences of substrate temperature (T-s) and substrate material in pulsed laser deposition. Influences of T-s on growth orientation and oxygen content of as-grown films, and thus on transport properties were observed. Lattice mismatch between substrates and films has a direct effect on the epitaxial growth. Surface morphology of substrates should be considered in preparation of superlattices and multilayer devices, since high-resolution-transmission-electron-microscopy revealed that a one step defect on a SrTiO3 substrate surface developed into dislocations in a YBCO film. Additionally, undesired damage caused by differences in thermal expansion between substrates and films can be avoided by lowering cooling rates.