Metallicc LaNiO3 (LNO) films were prepared on LaAlO3 (LAO) and Si substrates by metal-organic decomposition (MOD) and their application as the bottom electrode for sol-gel derived (BaSr)TiO3 (BST) thin films was studied. X-ray diffraction, atomic force microscope and electrical measurements were used to characterize the multilayer films of BST/LNO/substrates. BST film on LNO-coated LAO substrate exhibited preferred (100) orientation. Smooth and dense surface with fine grains (similar to 50 nm) was observed. The electrical measurement results on BST films using LNO and stainless steel as the bottom electrodes, respectively, showed BST/LNO/substrates have higher dielectric constant, lower loss tangent, lower leakage current and higher breakdown voltage.