화학공학소재연구정보센터
Thin Solid Films, Vol.342, No.1-2, 47-51, 1999
Characterization of boron-doped tin oxide thin films
Boron-doped tin dioxide (SnO2:B) thin films were deposited on glass substrates using a spray pyrolysis technique. Detailed structural, optical and electrical properties of the materials with respect to varying substrate temperature are presented and discussed. The temperature of deposition as well as the degree of doping by boron greatly influenced the preferred orientation of microcrystallites along (211) and (301) planes in polycrystalline films. Optical data are reported at room temperature. The mechanism of conduction in B-doped SnO2 is discussed in relation to the results obtained.