The evolution of deposited nuclei occurs owing to a number of factors: incident and evaporated Vapor fluxes, surface migration of adatoms, convective and radiation heat transfer. The difficulty of modeling evolution lies in the necessity to take into account these factors simultaneously. In this paper an attempt of this kind of complex modeling was made with the purpose of finding and investigating the causes of the change of deposit structures. it was revealed that re-evaporation and secondary condensation are major causes changing deposit structures. The dependence of the change structure critical temperature on different parameters is discussed.