Piezoelectric (ZnO) and ferroelectric (PZT) thin films were deposited on different substrates (Au coated Si, Al2O3, Coming glass etc.) by reactive pulsed laser deposition, by using a pulsed Nd-YAG laser. ZnO films were deposited starting from high purity Zn plates while the PZT films were obtained from sintered targets, in different deposition conditions. The influence of the process parameters on the physical and chemical properties of the deposited films was analyzed by SIMS, XPS, XRD, SEM and TEM. XRD analysis showed that the ZnO films were c-axis oriented, while SEM on cross-sections showed evidence of a columnar structure. On PZT thin films XRD showed evidence of a crystalline pseudo-perovskite structure with (111) orientation, while surface and cross-section SEM studies showed evidence of a compact round grain structure. Electrical measurements on both ZnO and PZT films found good piezoelectric coefficients. The ferroelectric properties of the PZT films have been characterized by a Sawyer-Tower circuit. Samples of ZnO and PZT were selected and employed in the construction of acceleration sensor and bulk acoustic wave (BAW) devices. Results on frequency response and sensitivity of constructed devices as well as electroacustical characteristics are presented and discussed.