Thin Solid Films, Vol.343-344, 558-561, 1999
Influence of substrate misorientation on the structural characteristics of InGaAs GaAs MQW on (111)B GaAs grown by MBE
The dependence of the defect structure on substrate misorientation is investigated in InGaAs/GaAs(111) multiple quantum well heterostructures. Samples were simultaneously grown by molecular beam epitaxy on GaAs(111)B substrates misoriented 1 degrees off towards [(2) over bar 11] and 2 degrees off towards [2 (1) over bar (1) over bar] under optimized growth conditions for both off-axis substrates, For both substrate misorientations two different dislocation networks are evidenced: first, a triangular 60 degrees misfit dislocation array with [(1) over bar (1) over bar (1) over bar] directions and second, a new dislocation configuration seen for the first time with dislocation lines parallels to [11 (2) over bar] directions. This latter can work as a dislocation multiplication source for In-content above 25% for the structure chosen being more active in 2 degrees off substrates than in 1 degrees off ones. The activation of this new dislocation source may drastically affect the optical properties of the multiple quantum wells.