화학공학소재연구정보센터
Thin Solid Films, Vol.345, No.1, 60-66, 1999
Structural characterization of diamond thin films prepared by plasma jet
A diamond film was synthesized on molybdenum substrate by chemical reaction of methane and hydrogen gas using plasma jet at atmospheric pressure. X-ray diffraction and Raman spectroscopy were used to observe internal fiber texture and film quality, respectively. The film had a good crystallinity at 4% CH4 and the substrate temperature of 970 degrees C. Upon increasing CH4 concentration, the him structure changed from (111) faces to cubic (100) faces with secondary nucleation taking place. When organic compounds were used as a precursor for diamond synthesis, morphology of the deposited film is cubic (100) faces at the edge of the film, The thickness of diamond film deposited was measured as a function of substrate temperature at the optimum synthesis condition established