화학공학소재연구정보센터
Thin Solid Films, Vol.347, No.1-2, 46-55, 1999
Correlation between hardness and embedded argon content of magnetron sputtered chromium films
Chromium films were produced on steel substrates by d.c. magnetron sputtering in pure argon at a target power density of 2, 4, 10 or 16 W/cm applying a negative substrate bias voltage, V-s, ranging from 4 to 1000 V. The substrate temperature varied from 158 to 600 degrees C. Some experiments were conducted at a constant temperature of 600 degrees C. The film hardness was measured by Vickers microindentation. Gas content in the films was analyzed by electron probe microanalysis. The film microstructure was investigated by X-ray diffraction and transmission electron microscopy. At constant deposition rate, while increasing the substrate bias, first the film hardness remained constant and beyond a threshold bias value increased from 4 to 11.7 GPa. The threshold bias value increased with the target power density. The temperature series performed at V-s = 500 V and a target power density of 4 W/cm(2) revealed that the film hardness decreased from 12 GPa to 8 GPa when increasing the substrate temperature from 300 to 600 degrees C. The microstructure of the films was found to vary with the deposition parameters. However, over the results for all the experiments performed here, a clear relationship has been established between the microhardness and the argon content of the films. Furthermore, a relationship between the argon content and the deposition rate was established for the films produced at V-s 500 V and T-s = 600 degrees C.