The morphology, microstructure and chemical composition of pure as well as Ca and P doped TiO2 films have been studied. The films were deposited using the aerosol-gel technique. After deposition as a liquid coating, subsequent evaporation of the solvent induces the polycondensation in the film. The final film densification was performed by heat-treatment at 80-500 degrees C. The thickness of the titanium oxide layers was adjusted to be in the range of 10 to 100 nm by varying the deposition time. Thicker films were prepared using a multi-layer deposition procedure. The films were characterized using Fourier transform infrared (FTIR) spectroscopy, ellipsometry, X-ray diffraction (XRD) and atomic force microscopy (AFM). Addition of dopants resulted in a pronounced densification of the films during the heat treatment due to loss of film crystallinity.