Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.19, No.24, 2263-2265, 2000 DOI10.1023/A:1006745428656 Export Citation Device patterning of PZT/Pt/Ti/thin films on SiO2/Si3N4 membrane by a chemical wet etching approach Liu W, Ko J, Zhu W Please enable JavaScript to view the comments powered by Disqus.
