Product branching ratios and rate constants for the O(P-3) atom and OH radical formation processes in the reaction of electronically excited oxygen O(D-1) atoms with fluoroethanes were measured at room temperature. The reactions of CHF2-CF3 (HFC-125), CH2F-CF3 (HFC-134a), CHF2-CHF2 (HFC-134), CH3-CF3 (HFC143a), CH2F-CHF2 (HFC-143), and CH3-CHF2 (HFC-152a) were studied. Laser-induced fluorescence techniques using vacuum and near-ultraviolet lasers are applied to the detection of O(D-1, P-3(2)) atoms and OH radicals, respectively. The results are compared with previous investigations, and reaction mechanisms are discussed on the basis of the present results. The rate constants for the OH radical production were proportional to the total number of H atoms included in the fluoroethane reactants, and those for the reaction processes are interpreted with the molecular structures of fluoroethane reactants.