The deposition manner of ZnF(OH) on the OH- and phenyl-terminated self-assembled monolayers (SAMs) in Zn-NH4F aqueous solutions has been investigated. NH4F plays a role as a control agent of supersaturation by complex formation in the deposition process of ZnF(OH). ZnF(OH) was deposited as spherical particles on a substrate and decomposed into ZnO by annealing at 300 degreesC in air. A shorter induction time for heterogeneous nucleation and a larger number density of nuclei of ZnF(OH) were found on the OH-SAM surface, which indicates a lower interfacial energy between ZnF(OH) and the OH-SAM surface. Taking advantage of the effects of the surface functional groups on the deposition manner, ZnO was successfully micropatterned by using photopatterned SAMs as templates.