화학공학소재연구정보센터
Materials Science Forum, Vol.338-3, 79-82, 2000
Role of temperature gradient in bulk crystal growth of SiC
The effects of axial and radial components of temperature gradient on the silicon carbide (SiC) bulk crystal growth were investigated. It was shown that the growth rate is a linear function of an axial temperature gradient in the growth chamber. In addition preliminary information relating radial temperature gradient to boule diameter enlargement is also presented. The grown crystals were analyzed by optical microscopy and X-ray diffraction.