Materials Science Forum, Vol.338-3, 431-436, 2000
Characterization of SiC using synchrotron white beam X-ray topography
A short review of recent synchrotron white beam X-ray topography (SWBXT) studies of defects in 4H and 6H SiC is presented. Defects observed include closed-core and hollow-core screw dislocations (micropipes) in 6H and 4H, deformation induced basal plane dislocations in 6H and 4H, and small angle boundaries in 4H. These studies include the analysis of the relationship between hollow-core diameter and the Burgers vector for micropipes using SWBXT and scanning electron microscopy (SEM), the principles of a set of SWBXT techniques and associated simulations for characterizing micropipes and closed-core screw dislocations, and the nucleation mechanism of micropipes obtained using SWBXT in combination with other techniques.