화학공학소재연구정보센터
Materials Science Forum, Vol.338-3, 457-460, 2000
In-situ observation of SiC bulk single crystal growth by x-ray topography
We report here for the first time on the in-situ observations for SiC bulk single crystal growth by x-ray topographic technique, Occurrence and dynamic observation of the defects such as micropipes and domain boundaries during SiC crystal growth by the modified Lely method was investigated in a real time display. The in-situ observation was considered to contribute for optimizing the growth conditions and to interpret the mechanism of defects and dislocations formation.