화학공학소재연구정보센터
Materials Science Forum, Vol.338-3, 845-848, 2000
Damage-free surface modification of hexagonal silicon carbide wafers
This paper outlines the general procedures for reducing the total lapping and polishing time for the preparation of silicon carbide wafers. By employing an abbreviated mechanical lapping/polishing process, coupled with chemical etching, the total process machine time has been reduced from 10+ hours to 65 minutes or less. The finished surface quality is comparable to commercially available wafers.