6H-SiC diodes with cellular structure to avoid micropipe effects

Badila M; Brezeanu G; Chante JP; Locatelli ML; Millan J; Godignon P; Lebedev AA; Lungu P; Banu V

Materials Science Forum, Vol.338-3, 1355-1358, 2000

Badila M, Brezeanu G, Chante JP, Locatelli ML, Millan J, Godignon P, Lebedev AA, Lungu P, Banu V

A cellular structure to avoid micropipe effects of 6H-SiC power devices is discussed. Using a matrix structure with 0.16mm(2) cell area pn mesa diode medium power (600V breakdown voltage and 1A at forward voltage of 5V) has been fabricated and tested. A especially technique to separate and to connect the good cells has been used.

Keywords:cellular structure;encapsulation technique;mesa pn diode;micropipe