CuInS2-based solar cells are prepared by a rapid thermal process (RTP). We use a sequential preparation with metallic layers of Cu and In rapidly heated in elemental sulfur vapor. Absorber layers from this process show good crystallinity, as seen from XRD and SEM. For further analysis of the defect chemistry, photoluminescence and admittance spectroscopy measurements are carried out. Solar cells prepared from these RTP absorbers have reached 11.4% total area efficiency (A = 0.5 cm(2)), which is to our knowledge the best CuInS2-based solar cell so far. (C) 2001 Elsevier Science B.V. All rights reserved.