Pure tetragonal and nanocrystalline 2 mol.% Y2O3-doped ZrO2 thin films are deposited on stainless steel substrates by electrostatic spray deposition (ESD) technique. Tetragonal phase is evidenced by Raman spectrometry and X-ray diffraction in an as-deposited film at 400 degreesC. Good homogeneity in composition is confirmed using wavelength dispersion scanning. The surface microstructure of dense to porous thin films is investigated varying both deposition parameters: substrate temperature and deposition time. (C) 2001 Elsevier Science BN. All rights reserved.