Thin Solid Films, Vol.377-378, 447-454, 2000
Image plate X-ray diffraction and X-ray reflectivity characterization of protective coatings and thin films
Two-dimensional image plate applications in X-ray diffraction (XRD) and X-ray reflectivity (XRR) characterization, using a grazing incidence geometry and radiation from a conventional X-ray tube, were explored. XRD and XRR data obtained from a conventional diffractometer using a Si (Li) detector complement image plate results to give more complete phase and structure information. Protective chromium coatings, electrochemically deposited onto the bore of steel cylinders, were investigated. Retained austenite content in martinsitic steel was measured in simulated, inside-diameter, bore geometry. This approach demonstrates the versatility of the method for non-destructive chemical analysis and phase differentiation of interior bore surfaces in piping structures. MATLAB-based processing software was developed to facilitate quantitative image analysis, including multiple 2 theta scans, chi -plots, and pole figure re-construction from multiple-phi images, where chi and phi designate, respectively, specimen tilt and rotation. For XRR applications, a 12-nm tantalum and an 82-nm tantalum oxide thin film sputtered on (100)-oriented silicon wafers were investigated. Density and thin him thickness were obtained from specular reflectivity modeling involving the periodicity of the interference fringes. Two-dimensional Kiessig interference-fringe images were analyzed and compared with conventional specular XRR for the measurement of thin film thickness and thickness uniformity over a sample.
Keywords:image plate;digital film;chromium;tantalum;tantalum oxide;austenite;martinsite;coatings;thin films;X-ray diffraction;X-ray reflectivity