화학공학소재연구정보센터
Thin Solid Films, Vol.381, No.2, 188-193, 2001
Ion beam synthesized silicides: growth, characterization and devices
Semiconducting silicides promise particular advantages for the development of optoelectronic devices in silicon. In particular, the direct gap of some of these silicides and the strong optical transitions make them good candidates for efficient light sources in silicon. Our work on the fabrication of iron disilicide and diruthenium trisilicide, materials and devices, using ion beam synthesis, is described here and offers a technology closely compatible with conventional silicon processing.