화학공학소재연구정보센터
Thin Solid Films, Vol.383, No.1-2, 101-103, 2001
Room temperature electric field induced crystallization of wide band gap hydrogenated amorphous silicon
Our results indicate that macroscopic areas (similar to mm(2)) of thin films of hydrogenated amorphous Si (a-Si:H) with high hydrogen content (20-45 at.% H) can be crystallized very simply by applying an above-threshold (similar to 2x10(5) V/cm) an electric field perpendicular to the film. We investigate p(+)-i-n(+) and p(+)-p-n-n(+) a-Si:H structures sandwiched between CrNi and ITO electric contacts. The crystallization is achieved at room temperature and normal air pressure. We believe this is a new type of metal-induced crystallization in solid phase, mediated by Ni (or Cr) silicides that are formed from the CrNi contacts. High concentration of voids in our high-hydrogen content a-Si:H structures may contribute to easy migration of the silicides, thereby catalyzing the easy crystallization.