A new acrylate bearing N,N'-diphenyl-N,N'-bis(4-methylphenyl)-[1,1'-biphenyl]-4,4'-diamine (TPD) was synthesized to apply for hole transport layer of an electroluminescent (EL) device. The thin film of this monomer was fabricated with physical vapor deposition. The obtained thin film was preliminarily irradiated with UV light and then heated up to 400 K in vacuum. The resulting polymer film, 60 nm thick, which had a polymer conversion of 96% had a smooth surface. This even surface could be maintained up to the heating of 420 K. These processes of deposition and polymerization were monitored with in situ reflection infrared spectroscopy. The EL device made of polymer thin film had three times higher efficiency than that from the monomer thin film.