Decomposition of CCl4, CCl2F2 CCIF3, and CF4 was studied in the presence of water vapor over AIPO(4). They began to decompose at about 300, 330, 450, and 550 degrees C, respectively. A good linear relationship between the reactivity of CFCs and the bond dissociation energy of the C-Cl bond suggests that the C-CI bond cleavage is the rate-determining step. The lattice structure of AIPO(4) before reaction was slightly distorted but the environment of Al and P ions became uniform after the reaction, consistent with a slight progress of crystallization of AlPO4. Supporting AlPO4 onto active charcoal is not preferable to the support because of its reactivity to water vapor. ALPO-5 was less active than that AIPO(4) because the inside of the pores of ALPO-5 is hydrophobic and not effective for the CCl2F2 decomposition. Meso-porous AlPO4 showed almost the same activity with AlPO4, but the destruction of the meso-porous structure brought about a loss of activity at 400 degrees C.