Ti-ZSM-5 is prepared via a chemical vapor deposition method by reacting HZSM-5 with TiCl4 at temperatures of 200-400 degrees C. Ti-ZSM-5 is characterized by skeletal- and surface hydroxy-FT-IR, XPS, and XANES spectroscopy. It seems that Ti is incorporated in the zeolite surface with tetrahedral coordination. Contents of incorporated Ti atoms in Ti-ZSM-5 zeolite increase with increasing SiO2/Al2O3 ratio and a CVD reaction temperature of 400 degrees C is optimal. Cyclohexanone ammoximation was used as test reaction and Ti-ZSM-5 catalysts show similar catalytic activities compared to TS-1.