화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.146, No.5, 1762-1765, 1999
Sulfur catalyzed electrochemical oxidation of copper: A combined ultrahigh vacuum electrochemistry study
Combined ultrahigh vacuum electrochemistry studies show that the presence of a submonolayer of sulfur on copper results in an approximately twofold increase in the anodic dissolution current in a mildly alkaline berate buffer solution when compared to S-free copper. X-ray photoelectron spectroscopy measurements reveal that S remains adsorbed on copper and exhibits no change in oxidation state. This chemistry could form the basis for the development of an anisotropic etch for copper in the microelectronics industry.