Microelectrodes were fabricated by carbonizing photoresist (700-1000 degrees C) that was patterned on a Si wafer by use of a mask and UV photolithography. Two geometric designs of interdigitated carbon microelectrodes were produced with dimensions of about 500 mu m length and 50 mu m width. The carbon structures were characterized by Raman spectroscopy, atomic force microscopy, and optical microscopy. The electrochemical response of the microelectrodes was investigated by cyclic voltammetry using the I-3(-)/I- redox couple. The collection efficiencies of carbon interdigitated array electrodes (IDAEs) varied from 59 to 90% depending on the cell size, geometry, and generator-collector arrangement. These collection efficiencies are comparable to those reported with multiband (n > 25 bands) IDAEs.