화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.148, No.4, G200-G206, 2001
Lifetime measurements by photoconductance techniques in wafers immersed in a passivating liquid
Lifetime measurement procedures with transient photoconductance decay and quasi-steady-state photoconductance techniques for wafers immersed in a passivating liquid are presented in this paper, in situ calibration methods are proposed based on the comparison between the output of both techniques on the same sample. Precautions concerning the handling of the passivating liquid are described. Resolution of the electron and hole lifetimes is performed in a set of samples.