Proton conductive membranes were prepared as thin films of about 10 mum thickness by an ion beam assisted plasma polymerization process. Argon ions were generated in a high frequency plasma and accelerated towards a PTFE target where CF fragments were released as a consequence of the ion impact. Various sulfur components (SO2, CF3SO3H or CISO3H) were added to achieve proton conductivity by the formation of sulfonic acid groups. The CF fragments combined with the sulfur components to form a coherent thin film on a substrate. Mass spectrometric investigations revealed, however, that sulfur oxygen compounds were extremely delicate towards reduction to sulfur carbon compounds like CS2 or SCF2. The best membrane conductivities (>10(-4) S/cm) and highest ion exchange capacities (0.15 mmol/g) were achieved with chlorosulfonic acid involved in the plasma polymerization process. Ultra-thin layers of these of these plasma polymers (ca. 300 nm) were subsequently deposited onto Nafion(R) membranes in order to suppress methanol permeation for a potential application in a direct methanol fuel cell (DMFC). The ratio of proton conductivity and methanol diffusion coefficient was employed for an assessment of the transport characteristics of the coated membrane. Diffusion coefficients were determined in a flow cell coupled to a mass spectrometer. The plasma polymer coating decreased both the methanol permeation and the proton conductivity. With a proton conductive plasma polymer coating the decrease of methanol diffusion could outweigh the loss of proton conductivity. Plasma coating offers a way to suppress methanol crossover in DMFCs and to maintaining the proton conductivity.