Pulsed high energy density plasma has been used to deposit aluminum nitride films on the surface of the 1Cr18Ni9Ti stainless steel (similar to 0.1% C, similar to 18% Cr, similar to 9% Ni, similar to 0.8% Ti). The formed films are composed of nanocrystalline-structured aluminum nitride phase, whose crystal sizes are about 10 nm. Transition areas are formed across the film to the substrate and strengthen the adhesion between them. The nanocrystalline-structured aluminum nitride films contribute to the improvement of the corrosion resistance of the modified stainless steel, whose corrosion rate has been reduced by about ten times compared with that of the unmodified stainless steel.