The effects of heat-treating atmosphere on the thermal stability of low-oxygen silicon carbide fiber were investigated. Heat-treatment of EB-cured PCS fiber were conducted at 1573 K in argon, nitrogen or vacuum of 10(-6) atm. Subsequently the fibers were exposed to 1873 K in argon. The strength of fibers were strongly influenced by the heat-treating atmosphere. When heat-treated in nitrogen, the fibers absorbed nitrogen. High-temperature exposure caused severe degradation of strength owing to the decomposition of silicon oxycarbonitride phase. When heat-treated in vacuum, the fiber surface was smooth and pore-free, minimizing the degradation of strength at high temperature.