The synthesis and properties of a class of soluble fluorine-containing aromatic polyimides are described. Substituents of trifluoromethyl groups an the aromatic rings of paralinked aromatic ether diamine conferred the polymer prepared thereof with enhanced solubility, low-moisture absorption, and low dielectric constants. The polyimides also exhibited exceptional thermal stability, good mechanical properties, and excellent hygrothermal resistance. These outstanding combined features ensure the polymers are desirable candidate materials for advanced microelectronics applications.