화학공학소재연구정보센터
Canadian Journal of Chemical Engineering, Vol.73, No.6, 908-917, 1995
Hydrodynamic Control of Gas-Phase Thickness of Semiconductors Deposited on Rotationally Symmetrical Bodies in Mixed Convention
The authors solve using an finite difference method the equations of steady-state laminar boundary layer around a body of revolution (sphere, extended and flattened ellipsoids). Hydrogen gas at 25 degrees C flows upward around the body. Its nose faces downward, the temperature of its surface is 500 degrees C and it rotates about its vertical axe at a constant velocity. The variability of the physical properties of the fluid as a function of temperature is considered as well as the resulting natural convection. It is revealed that flow, heat and mass transfers depend of the physical properties of the gas. It is possible to control the development of thermal and diffusional boundary layers through the operational conditions, specially the contour of the body.