The array of aligned, isolated carbon nanotubes was achieved by using chemical vapor deposition catalyzed by round alloy particles on the Ag film. The round alloy particles were prepared by annealing FeNi islands on the Ag film deposited by magnetic sputtering on the silica substrate. The size of the round particles was controlled by the size of the FeNi islands films and the heat treated temperature. The array of carbon nanotubes on the Ag film was obtained at 700 degrees C when the round alloy particles was about 30-80 nm in diameter.