화학공학소재연구정보센터
Thin Solid Films, Vol.340, No.1-2, 18-23, 1999
Chemical bath deposition of indium sulphide thin films: preparation and characterization
Indium sulphide (In2S3) thin films have been successfully deposited on different substrates under varying deposition conditions using chemical bath deposition technique. The deposition mechanism of In2S3 thin films from thioacetamide deposition bath has been proposed. Films have been characterized with respect to their crystalline structure, composition, optical and electrical properties by means of X-ray diffraction. TEM. EDAX, optical absorption, TRMC (time resolved microwave conductivity) and RBS. Films on glass substrates were amorphous and on FTO (flourine doped tin oxide coated) glass substrates were polycrystalline (is an element of phase). The optical band gap of In2S3 thin him was estimated to be 2.75 eV. The as-deposited films were photoactive as evidenced by TRMC studies. The presence of oxygen in the film was detected by RBS analysis.