Er3+- and Yb3+- ions-co-doped silica thin films were prepared by RF magnetron sputtering. Enhanced photoluminescence centered at 1.534 mu m was detected at room temperature when excited by a Nd-YAG laser lint at 1.064 mu m. The photoluminescence intensity increases with Yb-atom doped concentration and tends to saturate at the Yb-atom concentration of 3.0%. indicating that the enhanced photoluminescence results from the energy transfer from Yb3+ to Er3+.