La0.5Sr0.5Co3-delta (LSCO) thin films were deposited on yttria stabilized zirconia (YSZ) substrates by pulsed laser deposition (PLD) for application to thin film solid oxide fuel cell electrodes. During the deposition, the substrate temperature was varied from 450 to 750 degrees C, and the oxygen pressure in the chamber was varied from 80 to 310 mTorr. Films deposited at 650 degrees C and an oxygen background pressure of 150 mTorr were mostly (100) oriented. Deposition at higher temperatures or under lower oxygen pressures lead to mostly (110) oriented films. Films with low electrical resistivity of 10(-3) Omega.cm were obtained.