TiO2 is the most widely used hard oxide film material for interference coatings in the visible range with high refractive index. Mixtures with other oxides are used for modifying the film properties. Thin films of TiO2, Dralo (a Ti-Al-oxide), and Ida (a Ti-Pr-oxide), were prepared by reactive electron beam evaporation on substrates at 250 degrees C and without substrate heating. The refractive index and extinction coefficient as a function of oxygen flow or pressure, dispersion, stress and roughness of these films are compared. Index and stress data are also given for SiO2 and Lima 8, a Si-Al-oxide.