Thin Solid Films, Vol.353, No.1-2, 239-243, 1999
Porous freestanding diamond membranes with reduced pore diameter
We have shown previously that porous diamond membranes can be fabricated using a method based on growing diamond on a patterned silicon substrate. The technique used to pattern the silicon is conventional lithography. In this work we present a method for reducing the pore size using diamond post-deposition over the membrane. An important concern in this work was to determine the pore-shutting rate, considering the time post-deposition and the pore morphology.
Keywords:diamond;chemical vapor deposition (CVD);plasma processing and deposition;surface morphology