Thin Solid Films, Vol.365, No.2, 201-210, 2000
Modeling Cu thin film growth
A general overview of methods of modeling thin film growth on an atomic scale is provided, focusing on molecular dynamics (MD), energy minimization, and Monte Carlo methods. We emphasize how different methods can be integrated to provide a more powerful predictive capability. We give examples of how one can use atomic-level information to predict nucleation rates and facet growth rates of Cu islands.