화학공학소재연구정보센터
Thin Solid Films, Vol.375, No.1-2, 87-90, 2000
Conducting lanthanum nickel oxide as electrodes for lead zirconate titanate films
Lanthanum nickel oxide (LaNiO3 or LNO) is a conducting ceramic which has good potential for use as electrodes in multilayer actuators. In this work, lead zirconate titanate (PZT) films were prepared by a modified sol-gel process on stainless steel substrates. A LNO film prepared by a metal-organic deposition method was spin-coated onto the PZT film and the LNO/PZT him was cofired by rapid thermal processing at various temperatures. A transition layer consisting of a mixture of PZT and LNO was introduced between the LNO and PZT layer in order to enhance adhesion. The electrical resistivity of the LNO films was measured as a function of the sintering temperature and 750 degreesC was found to be the optimum sintering temperature. The microstructures of the LNO/PZT films were studied in a scanning electron microscope (SEM).